1. The diffusion pump is widely used in both industrial and research applications. 2. Older instruments may have used oil diffusion pumps for high vacuum regions. 3. The oil diffusion pump is operated with an oil of low vapor pressure. 4. Most modern diffusion pumps use silicone oil or polyphenyl ethers as the working fluid. 5. The two main types of molecular pumps are the diffusion pump and the turbomolecular pump. 6. The outside of the diffusion pump is cooled using either air flow or a water line. 7. One major disadvantage of diffusion pumps is the tendency to backstream oil into the vacuum chamber. 8. Unlike turbomolecular pumps and cryopumps, diffusion pumps have no moving parts and as a result are quite durable and reliable. 9. Data presented in Table 3 demonstrates polyphenyl ether to be superior to other fluids that are commonly used in diffusion pumps . 10. An oil diffusion pump is used to achieve higher vacuum ( lower pressure ) than is possible by use of positive displacement pumps alone.
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